Preparation and gas-sensing properties of very thin sputtered NiO films

Abstract We present results on very thin NiO films which are able to detect 3 ppm of acetone, toluene and n-butyl acetate in synthetic air operate at 300°C. with 25 50 nm thicknesses were prepared by dc reactive magnetron sputtering alumina substrates previously coated Pt layers as heater interdigitated electrodes. Annealed indexed the (fcc) crystalline structure their calculated grain sizes range from 22 27 nm. Surface morphology examined samples was influenced a rough compact granular substrate. Nanoporous film is formed an agglomeration small grains different shapes while they created every grain.